Fraunhofer Institute for Electronic Nano Systems ENAS
Fraunhofer Group for Microelectronics
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© Fraunhofer-Gesellschaft
About the institute
The Fraunhofer Institute for Electronic Nano Systems ENAS in Chemnitz focuses on research and development in the field of smart systems integration by using micro and nano technologies.
The growing complexity and miniaturization of innovative products lead to the fact that systems integration will be getting more and more important for the scientific and technical development. Thereby, not only multi functionality but also the implementation of different devices consisting of different materials plays an important role. The integration of nano materials as well as printed functionalities causes new challenges and requires new approaches in terms of design, testability, reliability and security. Fraunhofer ENAS is picking up these topics in the business units micro and nano systems, green and wireless systems and micro and nanoelectronics/back-end of line.
Derived from the needs of the industry Fraunhofer ENAS focuses on
- High precision silicon MEMS und NEMS (micro electro mechanical system und nano electro mechanical system)
- New system concepts based on innovative materials,
- Polymer based systems, nano composite integration
- System design and test
- EMC compatible design
- Wafer level packaging of MEMS and NEMS,
- Metallization and interconnect systems for micro and nano electronics as well as 3D integration
- Printed functionalities
- Reliability and security of components and systems
Fraunhofer ENAS belongs to Saxon, German, European and worldwide networks with large-scale enterprises as well as small and medium size enterprises. Especially strong cooperation exists with the Center for Microtechnologies of the Chemnitz University of Technology, which is also managed by Prof. Geßner, and with other partners within the Smart Systems Campus Chemnitz.
Facts and Figures
- Founded in: 2008
- Employees (2011): 102
- Budget (2011): €8,41 million
News on the institute
BMBF funds excellent research in Chemnitz and Dresden
The Fraunhofer Institute for Electronic Nanosystems ENAS will be involved in two projects over the...

